GPTECH air-cooled precision chiller in a semiconductor cleanroom
SEMICONDUCTOR THERMAL SYSTEMS

Precision Thermal Intelligence

Stable temperature control that protects process performance, yield and uptime.

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  • 5–85℃Temperature range
  • ±0.1℃Control accuracy
  • 0.01℃Display resolution
  • Precise Control ±0.1℃ high-precision control
  • Intelligent PID Adaptive control algorithm
  • Multi-Layer Protection Keeps equipment running safely
  • Industrial Comms RS485 Modbus RTU

Industries

Wafer and probe head on inspection equipment

Semiconductor Equipment

Stable thermal load control that protects process accuracy
Precision analytical instruments in a cleanroom

Analytical Instruments

Meets laboratory duty cycles with long-term stability
Laser cutting a metal workpiece

Precision Machining

Supports laser, CVD and test-platform thermal control
Pharmaceutical vial filling line in a sterile room

Pharma & Chemical

Keeps process temperature steady

Integrated Cooling & Heating System

PreciseResponsiveReliable

  • Cooling & heating in one Covers a wide range of process needs
  • PLC intelligent control Real-time monitoring and fine adjustment
  • High-efficiency circulation Brings temperature to set point fast
GPTECH integrated cooling and heating system: condenser, compressor, evaporator, expansion tank, circulation pump and user equipment123456
  1. 1Air-cooled condenser
  2. 2Compressor
  3. 3Evaporator / buffer tank
  4. 4Expansion tank
  5. 5Circulation pump
  6. 6User equipment
Cooling loopHeating loop

TLS Series Models

TLS-1.5
TLS-1.5 1.5

Range: 5–85℃
TLS-2.5
TLS-2.5 2.5

Range: 5–85℃
TLS-3.5
TLS-3.5 3.5

Range: 5–85℃
TLS-5.5
TLS-5.5 5.5

Range: 5–85℃
TLS-7.5
TLS-7.5 7.5

Range: 5–85℃
TLS-10
TLS-10 10

Range: 5–85℃
TLS-15
TLS-15 15

Range: 5–85℃
View full specifications

Outlet temperature holds to ±0.1℃, and the touchscreen’s curve logging lets us keep a traceable thermal record for every run.

Equipment Engineering Lead Semiconductor manufacturer

Find the right unit for your process

Seven series spanning -150℃ to +350℃ — from semiconductor processes to analytical instruments, precision machining and industrial process cooling. Send us your target temperature, heat load and flow, and an engineer will reply within one working day.

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